Sub-angstrom surface roughness metrology with the white light interferometer"
Shawn Iles and Jayson Nelson
SPIE
11/15/2019 5:00:00 AM
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11175/1117519/Sub-angstrom-surface-roughness-metrology-with-the-white-light-interferometer/10.1117/12.2536683.full
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